Nanoindentation is an effective way of finding mechanical properties at nanoscale. They are especially useful for thin films where elimination of the substrate effect is required. The mechanism is based upon depth sensing indentation based on Oliver and Pharr modeling. The load-depth curves as well as time on sample were analyzed. Indentation impulse was found to have significant contribution in the nature of failure zone during indentation. Fracture toughness was also related to time on the sample.